XPS Facilities provided at cmem-unm

Kratos AXIS ULTRA X-ray Photoelectron Spectrometer

Description:
Kratos AXIS ULTRA X-ray Photoelectron Spectrometer offers advanced capability of high sensitivity, high energy resolution and high lateral resolution image analyses.

SEM

Technique Characteristics:
  • Sampling Depths: &060;10 nm and variable with ARXPS
  • Spectroscopy: large area analysis: 300x700 m and small areas analysis 100-15 m
  • Imaging: parallel and real-time, FOV (200-700 m), and lateral resolution: &060;5 m
  • Primary sources: dual anode Mg and monochromatic Al
  • Ion source: sputtering and cleaning samples
Other Characteristics:

  • General:

    • Identification of all elements (except H and He) present in the outermost 10 nm of a surface in concentrations &062; 0.1 atomic %
    • High energy resolution: information about the molecular environment (oxidation state, bonding atoms, etc.)
    • Quantitative: determination of elemental surface composition (2% or better)

  • Fast parallel imaging:

    • Information on lateral variation in composition (spatial resolution down to 5 m)
    • Real-time parallel detection that allows high quality chemical images to be obtained in only a few seconds
    • Multispectral image acquisitions combine high energy resolution and high spatial resolution allowing analysis of lateral distribution of chemical states

  • Multi-point spectroscopy:

    • The incorporated electrostatic deflection system allows easy multi-point analysis to be carried out from within the imaged field of view without translating the sample
    • Small area analysis from down to 15m areas by conventional experiments
    • Small area analysis from down to 1m with Multispectral image acquisitions and multivariate image analysis methods

  • Depth profiling:

    • Non-destructive depth profiling using Angle-Resolved XPS in outer 10nm
    • Destructive depth profiling several hundreds of nm into the sample
    • Ion gun for in-situ sample cleaning

  • Sample requirements:

    • Insulating and conducting samples analysis through the incorporation of the Kratos patented charge neutralization system
    • Sample must be compatible with ultrahigh vacuum
Types of analytical problems solved:
  • High spatial resolution analysis of chemical heterogeneities and detection of chemical phases in multicomponent samples (polymer blends, nanocomposites, FIB-milled samples) through combination of imaging and multi-point small area analysis.
  • Determination of the oxidation states of elements (catalysts, metal alloys, product of corrosion) - see Case studies
  • Analysis of molecular orientation and thickness determination via ARXPS for multilayered samples(self-assembled layers, thin organic layers, semiconductors, nitrided gate oxides) - see Case studies
  • DNA microarray analysis
  • Depth profiling through sputtering of inorganic samples
  • Polymer isomer analysis through Valence Band Spectra
  • Failure analysis, reverse engineering

Related links:
Kratos

To schedule time on this instrument or to learn more about its capabilities and user fees etc. please contact:

Kateryna Artyushkova, Research Assistant Professor, Chemical & Nuclear Engineering
505 277-0750, Email: kartyush@unm.edu