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H!Q!H!H"Q"H"H#Q#H#H$Q$H$H%Q%H%H&Q&H&H'Q'H'H(Q(H(H)Q)H)H*Q*H*H+Q+H+H,Q,H,H-Q-H-H.Q.H.H/Q/H/H0Q0H0H1Q1H1H2Q2H2H3Q3H3H4Q4H4H5Q5H5H6Q6H6H7Q7H7H8Q8H8H9Q9H9H:Q:H:H;Q;H;HQ>H>H?Q?H?H@Q@H@HAQAHAHBQBHBHCQCHCHDQDHDHEQEHEHFQFHFHGQGHGHHQHHHHIQIHIHJQJHJHKQKHKHLQLHLHMQMHMHNQNHNHOQOHOHPQPHPHQQQHQHRQRHRHSQSHSHTQTHTHUQUHUHVQVHVHWQWHWHXQXHXHYQYHYHZQZHZH[Q[H[H\Q\H\H]Q]H]H^Q^H^H_Q_H_H`Q`H`HaQaHaHbQbHbHcQcHcHdQdHdHeQeHeHfQfHfHgQgHgHhQhHhHiQiHiHjQjHjHkQkHkHlQlHlHmQmHmHnQnHn@ VDDGND ledit.tdb ROWCROSSERTIEHIGHTIELOWCoreRowChannelCROSSABUTY  @Y  Y  %RP BUFCLKLBUFRSTRCLKRSTLibrary_Test.tpr YI  CoreABUTFrame PADLESSCORNERPADVDDPADGND mTSMd025p.tdbMirrorChipY  Y Y  Y      .cap.sdf 1.1 N Well Minimum Width .1.2 N Well to N Well Spacing p1.3 Deep N Well Minimum Width }&1.4 Deep N Well to Deep N Well Spacing  !1.5 Deep N Well to N Well Spacing p1.6 N Well Overlap Deep N Well 6'1.7 N Well Extension beyond Deep N Well .1.8 P Well Minimum Width -P1.9 P Well to P Well Spacing p2.1 Active Minimum Width  2.2 Active to Active Spacing  +2.3a PMOS Source/Drain spacing to Well Edge, p&2.3b NMOS Source/Drain spacing to Well+ p2.4a Well Contact to Well Edge:  &2.4b Substrate Contact to Well Spacing<  3.1 Poly Minimum Width 3.2 Poly to Poly Spacing  %3.2a Poly to Poly Spacing Over Active((   3.3 Gate Extension out of Active 3.4a/4.1a Source/Drain Width:  3.4b/4.1b Source/Drain Width<  3.5 Poly to Active Spacing 3.6 Poly Density> 4.2a Active to Select Edge/ 4.3a N-Select Edge to ActCnt 4.3b P-Select Edge to ActCnt (4.3c Not Exist: ActiveContact not on act0 4.4 Select Minimum Width/ !4.4c N-Select to N-Select Spacing !4.4d P-Select to P-Select Spacing .4.5 Not Existing: P-Select Overlap of N-Select? %4.6 Not Existing: Not Selected Active; 5.1a Poly Contact Exact Size !5.2A/5.6B Poly Overlap of PolyCnt $5.2b Not-Exists: PolyCnt_not_on_Poly= )5.3A Poly Contact to Poly Contact Spacing   5.4 Poly Contact to Gate Spacing( 6.1a Active Contact Exact Size %6.2a Active Overlap of Active Contact% -6.3a Active Contact to Active Contact Spacing  #6.4a Active Contact to Gate Spacing( 7.1 Metal1 Minimum Width  7.2 Metal1 to Metal1 Spacing   "7.3 Metal1 Overlap of Poly Contact $7.4 Metal1 Overlap of Active Contact &7.4b Metal1 larger than 3.0um spacing2 p7.5 Metal1 Density1 8.1 Via1 Exact Size 8.2 Via1 to Via1 Spacing  8.3 Metal1 Overlap of Via1 8.5a Via1 to Poly Spacing 8.5b Via1 to Active Spacing 9.1 Metal2 Minimum Width  9.2a Metal2 to Metal2 Spacing   9.3 Metal2 Overlap of Via1 %9.4 Metal2 larger than 3.0um spacing8 p9.5 Metal2 Density4 '10.1a Bonding Area: OverGlass (60x60um) S%10.3 Pad metal overlap of passivation )10.4a Pad to Unrelated-Metal4 Space(30um) )10.4b Pad to Unrelated-Metal3 Space(30um)* )10.4c Pad to Unrelated-Metal2 Space(30um)* $10.4d Pad to Unrelated-Metal1 (30um)* (10.5a Pad to Unrelated-Poly Space (15um)* '10.5b Pad to Unrelated-Act Space (15um)* 14.1 Via2 Exact Size 14.2 Via2 to Via2 Spacing  14.3 Metal2 overlap of Via2 15.1 Metal3 Minimum Width  15.2 Metal3 to Metal3 Spacing  15.3 Metal3 Overlap of Via2  &15.4 Metal3 larger than 3.0um spacing9 p15.5 Metal3 Density7 !20.1 Silicide Block Minimum Width #20.2 Silicide Block Minimum Spacing 220.3a Silicide Block Min Spacing to Active Contact 020.3b Silicide Block Min Spacing to Poly Contact 220.4 Silicide Block Min Spacing to External Active 020.5 Silicide Block Min Spacing to External Poly "20.7 Silicide Block Min Poly width- J20.8 Silicide Block Min Spacing of Poly resistors in Silicide Block region-- (20.9a Silicide Block Min overlap of Poly- &20.9b Silicide Block overlap of active (20.10a Poly extend out of Silicide Block  *20.10b Active extend out of Silicide Block  (20.11 Min spacing Silicide Block to gate 21.1 Via3 Exact Size 21.2 Via3 to Via3 Spacing  21.3 Metal3 Overlap of Via3 22.1 Metal4 Minimum Width  22.2 Metal4 to Metal4 Spacing  22.3 Metal4 Overlap of Via3 &22.4 Metal4 larger than 1.2um spacing p22.5 Metal4 Density 24.1 Thick Active Minimum Width )24.2 Thick Active to Thick Active Spacing #24.3 Thick Active Overlap of Active #24.4 Thick Active to Active Spacing 24.5 Poly Width in HV gate)  AMI 0.5 um Process (SCN3M_SUB)(    ȑ   AMIS_C5N.ext inverter.sp 5  .INCLUDE AMIS_C5N.modlib     * Generic_025.xst3 5    h+ 4Cd7 k %w0.1 b*w cnt_via_29 Y \ l2\ l2Y\l U50Y \ /  Y\XlU51Y \X /  Y\l`U52Y \ /  Y\L(l[U53Y \L( /  Y\l!0U54Y \ /  Y\ l U55Y \  /  Y\ `l U56Y \ ` /  Y\ al qhU57Y \ a /  Y\ '0l 6U58Y \ '0 /  Y\#l2U59Y Y   Y\xlU60Y Y    Y\hlU61Y Y   Y\lU62Y Y   Y\lpU63Y Y   Y\HlU64Y Y`   Y\s8lU65Y YoP   Y\_loPU66Y Y[   Y\8lH@U67Y Y4   Y\%l4U68Y Y!0   Y\ l U69Y Y    Y\ l U70Y Y    Y\ pl U71Y Y    Y\ l U72Y Y    Y\ l xU73Y Y    Y\ uPl U74Y Y qh   Y\ N@l ]U75Y Y JX   Y\ :l JXU76Y Y 6   Y\ l #HU77Y Y    Y\ l U78Y Y 8   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'8: b+wnmos_esd360_M1 Y H (H (Y" (U1461IY H   YH (qU1462 HH   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'*) b+wPad_Bond Y CCCCC''ААCu0u0ppC 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GndM2B-12CY5x@^GndM2BY? 5?^Y ?x@ / GndM2B-13CY 90^VddM2AY ^Y  90 / VddM2A-14CYy 90VddM2AY yY  90 / VddM2A-15CY,p^VddM2BY ,^Y p / VddM2B-16Y,ypVddM2BY ,yY p / VddM2B-17#Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      B$'$c*w Cnt_PolyM1 << << C<< CC00#Tanner EDA Library Development Team  Tanner Research, Inc. &C:\TANNER-PROJECT\Motorola\mhp_n05.ext  .include ext_devc.md      $'$ b+wmos50_15Mid_M1 Y 0p}0p}C}C0N pYC R:o0}FP@P#(YYixzyU2092IEkY ~e   YFP@PU2093Y , x   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'  b+wesd_pmosTopBot_M1 Y q q CR& CYp] Y]Y Y YY>Y> Yp p]Yi0 Yi0Yi0 Y>8 Y>8::N CYU" Y"UY" Y0 Y0YFPYFP Y UCYq YqYq Y6h Y6hBhBhЈFPܐ Cب CYa( Y(aY( Y YaYi0 Yi0Yi0 Y>8 Y>8:Y:Y@h P:0P:0aPYP U2086Y  /  YhU2087IEkY h  /  Y8h U2088Y 8h /  YFPܐ U2089Y N  (  #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md     ߀ $ '6 b*wpmos_esd180_M1  Y 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Y\lU81Y \ /  Y\HlU82Y \H /  Y\_loPU83Y \_ /  Y\%l4U84Y \% /  Y\ l U85Y \  /  Y\ l U86Y \  /  Y\ uPl U87Y \ uP /  Y\ :l JXU88Y \ : /  Y\#l2U89Y Y   Y\l U90Y Y   Y\hlU91Y Y   Y\XlU92Y Yp   Y\lpU93Y Y   Y\l`U94Y Y   Y\s8lU95Y YoP   Y\L(l[U96Y YH@   Y\8lH@U97Y Y4   Y\l!0U98Y Y    Y\ l U99Y Y    Y\ l U100Y Y    Y\ pl U101Y Y    Y\ `l U102Y Y x   Y\ l xU103Y Y    Y\ al qhU104Y Y ]   Y\ N@l ]U105Y Y JX   Y\ l #HU106Y Y    Y\ l U107Y Y 8   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $' b*w cnt_via_23 Y }!0}!0Ypp!0U27Y pp /  Y!0U28I߀Y %   Y(!0U29Y ( /  Y@ !0U30Y @ /  Y"P1!0U31Y "P /  YI`Y!0U32Y I` /  Y0!0U33Y 0 /  Y!0U34Y  /  Y 8/!0U35Y  8 /  YGHV!0U36Y GH /  YnX}!0U37I߀Y jp%   YZjp!0U38I߀Y V%   Y3C`!0U39I߀Y /%   Y P!0U40I߀Y %   Y@!0U41I߀Y %   Y0!0U42I߀Y %   Y!0U43I߀Y  %   Y\l!0U44I߀Y Y%   Y5Ex!0U45I߀Y 1%   Yh!0U46I߀Y  %   YX!0U47I߀Y %   YH!0U48I߀Y %   Y !0U49I߀Y %   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'1 b+wnmos15_50TopBot_M1 Y 0p0pCC0#(p.CYFPY@PY@PYY@PYFPFPY؈o0BhYL2[BhU2109Y L2 /  Y_2o0}U2110Y _2 /  Ys2}U2111Y s2 /  Y2BhU2112IEkY 2  /  YD8SU2113Y @P   YWg`U2114Y S   YD8SU2115Y @P   YD8SU2116Y @P   YkHzU2117Y g`   Y0@PU2118Y ,   YD8SU2119Y @P   Y0@PU2120Y ,   YU2121Y    YިU2122Y     YU2123Y 0   Y(,U2124Y @   Y U2125Y    Y0U2126Y ި   Y @U2127Y    YFPm`@P}U2128Y ,ix x   Y U2129Y    Y0U2130Y ި   Y @U2131Y    Y0@PU2132Y ,   YWg`U2133Y S   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'#. b+wesd_pmos1550Mid_M1 Y qqC&C0p>>8i0C FP0"C 6hqFPܐCبC00>8i0(YFPP}U2105Y FP /  Y82}U2106Y 82 /  Y2BhU2107IEkY 2 /  YFPܐU2108 N     #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $'3# b+wsubstrate_td_cntvia_M1 Y !t!tCe@m`e0m`eبm`xem`hem`ewm`~ecxm`kHem`FPepm`@>0FP>بFPx>FPh>FP>wFP~>cxFPkH>(FP0>FP >HFP>8FP>FP>FPp>yFP>RFPY>>FPFP>pFP@p@@p0@pب@xp@hp@pw@~pcx@kHp@FPpp@@   Xcx kHO W( 0X (H   ( y e m`> FP* 2 *2* 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Research, Inc.   .include ext_devc.md      $!'  b*w cnt_via_18 "Y H >XH >XYH0*U244Y H0 /  YH8U245Y H /  YHU246Y H /  YHkh{U247Y Hkh /  YH0@pU248Y H0 /  YH 8U249Y H 8 /  YH.>XU250Y `*   YHHU251Y `   YH U252Y `8   YHܰU253Y `(   YH(U254Y `   YHxU255Y `   YH~U256Y `{   YHWgU257Y `S   YHDXSU258Y `@p   YHH,U259Y ``   YH `U260Y `   YH  PU261Y `    #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $"'3# b+wsubstrate_tu_cntvia #Y ``Y`U2341Y u0 /  YPX`U2342Y h   YN (]U2343Y N (   Y@`U2344Y ` /  YxU2345Y  /  YU2346 :   Y#(`U2347 :   Y'6U2348 ':   Y:J8`U2349 ::   N ]6U2350 N    YaqH`U2351 a:   Yu0U2352 u0:   YXhU2353Y :   Y@U2354Y @:   Yh`U2355Y :   YPU2356Y P:   Yx`U2357Y :   Y`U2358Y `:   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $#'9 b*wtieup $Y ppCJ8J88YHCYUUMYUYMYUMUUYYY222Y2pY̨pY̨2Y2YYЈCYN N PU`YPN N N YN U`YPU`CYpYpYp:::Y:hYhY:Yp:YpYCY ~YY~YH~YH#(#(#(Y#(~Y ~ ЈY $Y$YY Y $Y#($Y#(XYHXYH$YYYMYYY Y Y `Y$`Y$ Y2 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@:   Y 0h U2339Y  :   Y4PC0U2340Y 4P:   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $%'*0 b*wvia2 &C#Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $&'1 b+wnmos15_50Mid_M1 'Y 0p0pCC0#(p.C Ro0BhFPY@PYL2[BhU2094Y L2 /  Y_2o0}U2095Y _2 /  Ys2}U2096Y s2 /  Ya2BhU2097IEkY 2 /  YYzU2098IEkY ~   YFPm`@P}U2099Y ,ix x   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $''1 b+wmos15_50TopBot_M1 (Y 0p0pCC0#(p.C FPY@Po0BhYD8SU2134Y @P   YWg`U2135Y S   YD8SU2136Y @P   YD8SU2137Y @P   YkHzU2138Y g`   Y0@PU2139Y ,   YD8SU2140Y @P   Y0@PU2141Y ,   YU2142Y    YިU2143Y     YU2144Y 0   Y(,U2145Y @   Y U2146Y    Y0U2147Y ި   Y @U2148Y    YFPm`@P}U2149Y ,ix x   Y U2150Y    Y0U2151Y ި   Y @U2152Y    Y0@PU2153Y ,   YWg`U2154Y S   #Tanner EDA Library Development Team  Tanner Research, Inc.   .include ext_devc.md      $('1. b*wPADVDD )Y HiPHiPCY<p^VddM1A <^Y p / VddM1A-0CY5y 90GndM1AY? 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5H)8\r[?.`eHBhXw>XqHpBhix_H@(8pw(wm`@Qx>Bhpfvp,U`e|pfg`vpw.>p `@ P` Pp `p `g` p, p@P S @ #z #0 J 1`@ JCYpYpYpPY!PY!АY8АY8PYIPYIАYa`АYa`PYpPYpYYYLYL~Y~Y?x@Yx@Yx@PYPYАYАYPYx@PYx@Y?Y?Y 90Y 90Y 90PYPYАY@АY@PYPYАY 8АY 8PY 90PY 90YYYpYpYpPY]0PY]0АYtАYtPYpPYpYYP=0hMH@=kMHz=MH8=0MH=MH*h=U`MHe=|pMHQ0C`SQ0~`(Q0 `Q0`XQ0.P`=Q0h`x(88O_HvXhx(88O_HvXhxxhX[kH4D8 (xh[kH4D8 (xhYu08\[U378Y u08\ /  Yp8\[U379Y p8\ /  Y8\p[U380Y 4t   Y08\[U381Y 08\ /  Y8\0[U382Y ި4t   Y8\[U383Y 8\ /  YP8\[U384Y h4t   Y8\P[U385Y 8\ /  Y8\[U386Y (4t   YK p[U387Y G   Y8\ pGU388Y 4t   Y0K[U389Y 0K /  Y08\GU390Y 08\ /  YܐK0[U391Y بG   Yܐ8\0GU392Y ب4t   Yc08\r[U393Y c08\ /  YS8\c0[U394Y O4t   YC8\S[U395Y C8\ /  Y4P8\C[U396Y 0h4t   Y$8\4P[U397Y $8\ /  YB &8QU398Y B  /  YSHB bQU399Y SHB  /  YQ0B `QU400Y MH>8   Y=UMHeHU401Y 9Q   Y=.MH>8U402Y 9*   Y* B 9QU403Y &8>8   YU&8eHU404Y Q   Y.&8>8U405Y *   YB QU406Y (>8   YU(eHU407Y Q   Y.(>8U408Y *   YUeHU409Y Q   YB QU410Y >8   Y.>8U411Y *   YxB QU412Y Đ>8   YUĐeHU413Y Q   Y.Đ>8U414Y *   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