SMART Laboratory
(Smart materials and MEMS for Applied Research
Technology)
Mechanical Engineering Department
Prof. Nathan Jackson
Research:
§ Smart Materials – Smart materials are materials
where at least one property is altered by applying an external stimulus. Our
group focuses on piezoelectric materials with an emphasis on Aluminum Nitride,
but we work with a variety of other piezoelectric materials as well as other
smart materials, such as magnetics and electro-responsive polymers. The group
also specializes in flexible and stretchable materials. Our focus is on developing these materials
and developing methods to integrate them into a MEMS fabrication process. We
are interested in enhancing material properties as well as developing novel
materials through nanotechnology.
§ MEMS Applications
o
Energy Harvesting-
We
focus our efforts on vibrational energy harvesting using PiezoMEMS devices. The
main application for these devices is to replace batteries in Internet of
Things type applications as well as implantable such as leadless pacemaker. The
ultimate goal is to create a self-sustaining system that can harvest energy
from the ambient environment in order to increase the lifetime of the system
without the need to replace batteries.
The team focuses on all the aspects of developing a functional device
such as: i) enhancing power density, ii) increasing bandwidth, iii) tuning the
frequency, and iv) increasing reliability through advanced packaging methods.
o
Atomizers- Atomizers or aerosol
generators are used in a variety of applications. We are interested in
developing MEMS based atomizers in order to control droplet size and increase
functionality to the system. Applications include but not limited to: drug
delivery (nebulizer), spray coating, additive manufacturing, fuel injection,
and various other applications.
o
Acoustic Resonators (Sensors
& Actuators)- Acoustic resonators can be used as sensors or
actuators and widely used in every day life. Our group develops a wide range of
acoustic resonators including: surface acoustic resonators (SAW), Lamb wave
resonators (LWR), thin film bulk acoustic resonators (FBAR), and ultrasound
devices for a wide range of applications. These applications include
biosensors, gas sensors, particle sensors, RF filters, atomizers, ultrasound
stimulation or time of flight sensors. The group is focused on enhancing
performance and increasing sensitivity as well as developing a complete system
involving MEMS packaging.
o
Flexible and Stretchable Devices- The group has a strong
interest in developing flexible and stretchable sensors and packaging methods.
This includes development of Smart flexible or stretchable materials and
integrating them into a MEMS device such as Energy harvesters, atomizers, or
acoustic resonators. The PI has a strong interest in Parylene and other
flexible materials for packaging, coatings, and interconnects.
Research
Strategy: Our
strategy is to first develop the Smart materials and then integrate them into a
specific MEMS device, which could involve BioMEMS application. My group focuses
on material development and MEMS modeling both of which are necessary to
develop a MEMS device. Then we develop a fabrication process based on these.
Optimization of all three areas leads to enhanced performance of the device.
